Off-plane computer-generated waveguide hologram

We present the theory, design, fabrication and evaluation of off-plane computer-generated waveguide holograms (OP-CGWH's). The hologram structure is composed of an array of rectangular elements each containing a waveguide grating coupler. The function of the rectangular elements is twofold: outcoupling the guided optical wave, and introducing phase shift. The phase shift of each rectangular element can be determined by controlling the dislocation of the grating grooves along the guided wave propagation direction. In addition, the phase pattern of the OP-CGWH can be designed using many existing algorithms for computer-generated holograms (CGH), such as the iterative Fourier transform algorithm (IFTA). A design example is presented for a waveguide array generator, which outcouples a Gaussian-like incident guided wave and simultaneously produces an array of spots in free space. Such an OP-CGWH device, based on an AlGaAs-GaAs waveguide, was fabricated using electron-beam lithography and reactive ion beam etching. Experimental results are presented that demonstrate the effectiveness of the proposed idea. The uniformity error and the power efficiency of the fabricated OP-CGWH array generator were measured to be approximately 8% and 30%, respectively.