Microsystems and Smart Sensor Interfaces: A Review

Future integrated microsystems will benefit significantly from progress in the VLSI field. Two key elements will boost the implementation of new micro-integrated architectures: progress in batch-manufactured silicon sensors and the introduction of new circuit techniques for designing interface circuits. These two factors will be essential in favoring the transition from the present "research driven speculations" to "customer driven activities". This paper discusses the key issues in realizing microsensors and the most suitable circuit techniques for interfacing and processing their output signals. A number of examples of integrated structures will illustrate present problems and possible solutions.