Nondestructive microcharacterization of thin films SiO2, Cr, Si, Si3 N4, AlN and SiC deposited on quartz and molybdenum

Velocity dispersion curves of loading layers reveal the appearance of anomalies with valleys for quartz substrates and peaks for molybdenum substrates. These phenomena, quantified via an acoustic parameter, ξ, that takes into account both layers and substrates properties, explained the appearance of peaks and valleys. Moreover, the quantification in terms of relative Rayleigh velocities led to the determination of relations with a linear decrease with ξ for peaks and an increase with relative layer/substrate densities for valleys. Thus, these relations can predict anomalies appearance or disappearance and consequently facilitate any possible applications. © 2009.