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Publication Details
AFRICAN RESEARCH NEXUS
SHINING A SPOTLIGHT ON AFRICAN RESEARCH
engineering
Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry
Applied Optics, Volume 51, No. 20, Year 2012
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Description
The purposes of the paper are threefold: (1) to show the possibility to perform parallel phase-shifting Fizeau interferometry by using a quarter waveplate with high flatness as a reference, (2) to present a comparative study between the phase-shifting algorithm and the off-axis geometry in surface microtopography measurement, and (3) to show the advantages of using the proposed common path Fizeau interferometry over the quasi-common path Michelson interferometry in terms of accuracy in measurement. The compelling advantage of the proposed parallel phase-shifting Fizeau interferometric technique is the long-term stability that leads to measuring objects with a high degree of accuracy. © 2012 Optical Society of America.
Authors & Co-Authors
Ibrahim, Dahi Ghareab Abdelsalam
China, Xi'an
Xi'an Institute of Optics and Precision Mechanics Chinese Academy of Sciences
Egypt, Giza
National Institute of Standards
South Korea, Jeonju
Jeonbuk National University
Yao, Baoli
China, Xi'an
Xi'an Institute of Optics and Precision Mechanics Chinese Academy of Sciences
Gao, Peng
China, Xi'an
Xi'an Institute of Optics and Precision Mechanics Chinese Academy of Sciences
Min, Junwei
China, Xi'an
Xi'an Institute of Optics and Precision Mechanics Chinese Academy of Sciences
Guo, Rongli
China, Xi'an
Xi'an Institute of Optics and Precision Mechanics Chinese Academy of Sciences
Statistics
Citations: 52
Authors: 5
Affiliations: 3
Identifiers
Doi:
10.1364/AO.51.004891
ISSN:
1559128X
e-ISSN:
15394522