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Publication Details
AFRICAN RESEARCH NEXUS
SHINING A SPOTLIGHT ON AFRICAN RESEARCH
chemistry
Ultra-thin SiO
2
on Si IX: Absolute measurements of the amount of silicon oxide as a thickness of SiO
2
on Si
Surface and Interface Analysis, Volume 41, No. 5, Year 2009
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Description
Results from a study conducted between National Metrology Institutes (NMIs) for the measurements of the absolute thicknesses of ultra-thin layers of SiO2 on Si are reported. These results are from a key comparison and associated pilot study under the auspices of the Consultative Committee for Amount of Substance. 'Amount of substance' may be expressed in many ways, and here the measurand is the thickness of the silicon oxide layers with nominal thicknesses in the range 1.5-8 nm on Si substrates, expressed as the thickness of SiO2. Separate samples were provided to each institute in containers that limited the carbonaceous contamination to approximately <0.3 nm. The SiO2 samples were of ultra-thin on (100) and (111) orientated wafers of Si. The measurements from the laboratories which participated in the study were conducted using ellipsometry, neutron reflectivity. X-ray photoelectron spectroscopy or X-ray reflectivity, guided by the protocol developed in an earlier pilot study. A very minor correction was made in the different samples that each laboratory received. Where appropriate, method offset values attributed to the effects of contaminations, from the earlier pilot study, were subtracted. Values for the key comparison reference values (agreed best values from a Consultative Committee study) and their associated uncertainties for these samples are then made from the weighted means and the expanded weighted standard deviations of the means of these data. These results show a dramatic improvement on previous comparisons, leading to 95% uncertainties in the range 0.09-0.27 nm, equivalent to 0.4-1.0 monolayers over the 1.5-8.0 nm nominal thickness range studied. If the sample-to-sample uncertainty is reduced from its maximum estimate to the most likely value, these uncertainties reduce to 0.05-0.25 nm or ∼1.4% relative standard uncertainties. The best results achieve ∼1% relative standard uncertainty. It is concluded thatXPS has now been made fully traceable to the SI, for ultra-thin thermal SiO2 on Si layers, by calibration using wavelength methods in an approach that may be extended to other material systems. © Crown copyright 2009. Reproduced with the permission of Her Majesty's Stationery Office. Published by John Wiley & Sons, Ltd.
Authors & Co-Authors
Seah, M. P.
United Kingdom, Middlesex
National Physical Laboratory
Unger, Wolfgang E.S.
Germany, Berlin
Bundesanstalt Für Materialforschung Und -prüfung
Wang, Hai
China, Beijing
National Research Center for Certified Reference Materials
Jordaan, Werner A.
South Africa, Pretoria
National Metrology Institute of South Africa
Gross, T.
Germany, Berlin
Bundesanstalt Für Materialforschung Und -prüfung
Dura, J. A.
United States, Gaithersburg
Nist Center for Neutron Research
Moon, D. W.
South Korea, Yusong
Korea Research Institute of Standards and Science
Totarong, P.
Thailand, Amphoe Khlong Luang
National Institute of Metrology Thailand
Thailand, Pathum Thani
Thailand National Electronics and Computer Technology Center
Krumrey, Michael K.
Germany, Braunschweig
Physikalisch-technische Bundesanstalt
Hauert, R.
Switzerland, Dubendorf
Empa - Swiss Federal Laboratories for Materials Science and Technology
Zhiqiang, Mo
Singapore, Singapore City
Psb Corporation
Statistics
Citations: 38
Authors: 11
Affiliations: 11
Identifiers
Doi:
10.1002/sia.3045
ISSN:
01422421
e-ISSN:
10969918